Central Protection Cover
Product Introduction
Mounted on the surface of the Bottom Half Moon. Acts as a protective shield to prevent erosion from epitaxial process gases
Applicable Equipment
6''&8'' SiC Epitaxial Horizontal Reactors
Product Specifications
Substrate：Isostatic graphite（purity>6N）
Coating：β-SiC（thickness=100±10 μm）
Features：High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime
Product Category
SiC Epitaxy
Keywords
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Product Inquiry
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