Products and Applications

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6'' DR Wafer Supp

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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8'' DR Wafer Supp

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Bottom Half Moon

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Rotating Disk

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Tray

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity&conductivity, long lifetime

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Crystal Crucible

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity&conductivity, long lifetime

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