Products and Applications

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Susceptor Side Wall

Substrate:Sintered SiC

Coating:β-SiC(thickness=110±10 μm)

Features:High purity, excellent insulation, high-temperature and corrosion resistance, strong coating adhesion, and long lifetime.

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RPT Plate

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=110±10 μm)

Features:High density, high temperature resistance, strong coating adhesion, and long lifetime

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