UV-LED Tray
Product Introduction
MOCVD equipment accessories, capable of loading 19 pieces of 2'' Sapphire substrates, designed for growing deep ultraviolet epitaxial wafers used in LEDs
Applicable Equipment
AIX CCS
Product Specifications
Substrate:Isostatic graphite(purity>6N)
Coating:β-SiC(thickness=110±10 μm)
Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime
Product Category
MOCVD Tray
Keywords
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