TaC Ring
Product Introduction
Used for the growth of 6''&8'' SiC crystals to reduce crystal defects in the ingots
Applicable Equipment
Gen.3 Semiconductor SiC Crystal Growth Equipment
Product Specifications
Substrate:Isostatic graphite(purity>6N)
Coating:TaC(thickness=30~50 μm)
Features:High compactness, high temperature and corrosion resistance(<2600℃), strong coating adhesion, long lifetime
Product Category
SiC Crystal Growth
Keywords
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