RPT Plate
Product Introduction
RTA equipment accessories
Applicable Equipment
SiC RTA Equipment
Product Specifications
Substrate：Isostatic graphite（purity>6N）
Coating：β-SiC（thickness=110±10 μm）
Features：High density, high temperature resistance, strong coating adhesion, and long lifetime
Product Category
RPT
Keywords
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Product Inquiry
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Service Hotline
Email: sales@lh-csm.com
Address: 204-013, Building Q01, Changsha Zhigu Industrial Park, No. 116, Huizhi North Road, Dongfanghong Street, Xiangjiang New Area, Changsha City, Hunan, China
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