Susceptor Side Wall
Product Introduction
Mounted between the Upper&Bottom Half Moon, it serves for chamber support and insulation purposes, while its SiC coating prevents erosion by epitaxial process gases
Applicable Equipment
6''&8'' SiC Epitaxial Horizontal Reactors
Product Specifications
Substrate：Sintered SiC
Coating：β-SiC（thickness=110±10 μm）
Features：High purity, excellent insulation, high-temperature and corrosion resistance, strong coating adhesion, and long lifetime.
Product Category
SiC Epitaxy
Keywords
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Product Inquiry
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Service Hotline
Email: sales@lh-csm.com
Address: 204-013, Building Q01, Changsha Zhigu Industrial Park, No. 116, Huizhi North Road, Dongfanghong Street, Xiangjiang New Area, Changsha City, Hunan, China
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