Rotating Disk
Product Introduction
An air groove structure design on backside, enabling high-speed rotation while ensuring Wafer Supp rotate smoothly
Applicable Equipment
6''&8'' SiC Epitaxial Horizontal Reactors
Product Specifications
Substrate：Isostatic graphite（purity>6N）
Features：High purity, excellent thermal uniformity, long lifetime
Product Category
SiC Epitaxy
Keywords
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Product Inquiry
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Service Hotline
Email: sales@lh-csm.com
Address: 204-013, Building Q01, Changsha Zhigu Industrial Park, No. 116, Huizhi North Road, Dongfanghong Street, Xiangjiang New Area, Changsha City, Hunan, China
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