8'' SHIELDING RING
Product Introduction
Positioned at the edges of 8'' DR Wafer Supp to serve as alignment for SiC substrates
Applicable Equipment
6''&8'' SiC Epitaxial Horizontal Reactors
Product Specifications
Substrate：Isostatic graphite（purity>6N）
Coating：β-SiC（thickness=100±10 μm）
Features：High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime
Product Category
SiC Epitaxy
Keywords
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Product Inquiry
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Address: 204-013, Building Q01, Changsha Zhigu Industrial Park, No. 116, Huizhi North Road, Dongfanghong Street, Xiangjiang New Area, Changsha City, Hunan, China
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