6'' SHIELDING RING
Product Introduction
Positioned at the edges of 6'' DR Wafer Supp to serve as alignment for SiC substrates
Applicable Equipment
6'' SiC Epitaxial Horizontal Reactors
Product Specifications
Substrate：Isostatic graphite（purity>6N）
Coating：β-SiC（thickness=100±10 μm）
Features：High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime
Product Category
SiC Epitaxy
Keywords
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Product Inquiry
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Address: 204-013, Building Q01, Changsha Zhigu Industrial Park, No. 116, Huizhi North Road, Dongfanghong Street, Xiangjiang New Area, Changsha City, Hunan, China
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