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Substrate：Isostatic graphite（purity>6N）
Features：High purity, excellent thermal uniformity, long lifetime
Substrate：Isostatic graphite（purity>6N）
Features：High purity, excellent thermal uniformity, long lifetime
Substrate：Isostatic graphite（purity>6N）
Features：High purity, excellent thermal uniformity, long lifetime
Substrate：Isostatic graphite（purity>6N）
Features：High purity, excellent thermal uniformity, long lifetime
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