Substrate:CVD SiC(purity>6N)
Features:High Purity, corrosion resistance, high strength, stable chemical properties
Substrate:CVD SiC(purity>6N)
Features:High Purity, corrosion resistance, high strength, stable chemical properties
Substrate:Si(purity>6N)
Features:High Purity, corrosion resistance, high strength, stable chemical properties
Substrate:Si(purity>6N)
Features:High Purity, corrosion resistance, high strength, stable chemical properties
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity&conductivity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Features:High purity, excellent thermal uniformity&conductivity, long lifetime
Substrate:Isostatic graphite(purity>6N)
Coating:β-SiC(thickness=100±10 μm)
Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime
Substrate:Isostatic graphite(purity>6N)
Coating:β-SiC(thickness=100±10 μm)
Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime