Products and Applications

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SiC Electrode

Substrate:CVD SiC(purity>6N)

Features:High Purity, corrosion resistance, high strength, stable chemical properties

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SiC Ring

Substrate:CVD SiC(purity>6N)

Features:High Purity, corrosion resistance, high strength, stable chemical properties

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Si Ring

Substrate:Si(purity>6N)

Features:High Purity, corrosion resistance, high strength, stable chemical properties

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Si Electrode

Substrate:Si(purity>6N)

Features:High Purity, corrosion resistance, high strength, stable chemical properties

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6'' DR Wafer Supp

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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8'' DR Wafer Supp

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Bottom Half Moon

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Rotating Disk

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity, long lifetime

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Tray

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity&conductivity, long lifetime

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Crystal Crucible

Substrate:Isostatic graphite(purity>6N)

Features:High purity, excellent thermal uniformity&conductivity, long lifetime

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6'' SHIELDING RING

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=100±10 μm)

Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime

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8'' SHIELDING RING

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=100±10 μm)

Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime

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