Products and Applications

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A8 Tray

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=110±10 μm)

Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime

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K465i Tray

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=110±10 μm)

Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime

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UV-LED Tray

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=110±10 μm)

Features:High compactness, high temperature and corrosion resistance, strong coating adhesion, long lifetime

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TaC Ring

Substrate:Isostatic graphite(purity>6N)

Coating:TaC(thickness=30~50 μm)

Features:High compactness, high temperature and corrosion resistance(<2600℃), strong coating adhesion, long lifetime

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8'' DR Wafer Supp(TaC)

Substrate:Isostatic graphite(purity>6N)

Coating:TaC(thickness=30~50 μm)

Features:High compactness, high temperature and corrosion resistance(<2600℃), strong coating adhesion, long lifetime

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8'' Wafer Lifting Block(TaC)

Substrate:Isostatic graphite(purity>6N)

Coating:TaC(thickness=30~50 μm)

Features:High compactness, high temperature and corrosion resistance(<2600℃), strong coating adhesion, long lifetime

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Etching Ring/Focusing Ring

Substrate:CVD SiC(purity>6N)

Features:High Purity, corrosion resistance, high strength, stable chemical properties

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Susceptor Side Wall

Substrate:Sintered SiC

Coating:β-SiC(thickness=110±10 μm)

Features:High purity, excellent insulation, high-temperature and corrosion resistance, strong coating adhesion, and long lifetime.

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RPT Plate

Substrate:Isostatic graphite(purity>6N)

Coating:β-SiC(thickness=110±10 μm)

Features:High density, high temperature resistance, strong coating adhesion, and long lifetime

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